Workshop Description

Workshop Schedule


Hilton Head 2016
Workshop Homepage

12:30 - 1:00Registration
1:00 - 1:15Welcome
1:15 - 2:15Reliability of MEMS

Allyson Hartzell, Veryst Engineering
This presentation will cover common failure mechanisms in MEMS and examples of design and process fixes. Also covered will be: lifetime predictive methodologies, acceleration factor development, statistical distributions of reliability data, and case studies of non-standard MEMS reliability predictions. Simulation of MEMS, packaging, and systems will also be included. The presentation will provide guidance to the MEMS user and/or designer, with advice and how to fix problems before they happen, as well as how to fit data properly.

2:15 - 2:30Break
2:30 - 3:30Understanding Measurement Precision, Bias, and Uncertainty

Ted Doiron, NIST
I will discuss the differences between the philosophies of testing and calibration, the places where they might overlap, and suggest a way that calibration uncertainty and testing precision might lead to common ground. Knowing uncertainties is especially important when comparing results reported by different research groups, especially when the data between groups seems to exhibit contradictions.

3:30 - 3:45Break
3:45 - 4:45Dynamic Characterization of MEMS with a Laser Microscope

Jason Gorman, NIST
Laser interferometry is an important and broadly used tool for characterizing the dynamics of MEMS. Other laser-based methods, including knife-edge and photoelastic measurements, can also be used with great effectiveness to measure quantities in MEMS that cannot be transduced through interferometry. This presentation will provide an overview of these laser-based characterization techniques, describe the relative merits of each approach, and discuss measurement examples on MEMS resonators.

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